Microprocessor-based electro-optic switch

Key specification

electrostatic actuation

Mirror size: 820um in diameter

Max. tilt angle: X +/-2.2 deg., Y +/-2.2 deg.

Chip size: 1.7x1.7x0.65mm

Actuation voltage for Max tilt angle: <58V

Operating temperature: -5 to 75deg

Resonant frequency: >1100Hz